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Current edition approved by the North American Regional Standards Committee on July 11
製品，またはレチクル
and unpolished wafers are not covered in these specifications but they may provide guidance in connection with their procurement
wafers with deposited spheres of any material in this Practice serve as ‘light scattering intensity reference wafers’ rather than ‘size standards
NF3である。
C00340 - SEMI C3.40 - 四フッ化炭素（CF4），99.997%品質の仕様 StdPbc-0612 Current edition approved by theglobal Gases Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org200010 (CF4) Referenced SEMI Standards None.
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