C09000 - SEMI C90 - Specification for Perfluoroalkoxy Alkane (PFA) and Other Fluorinated Materials Used In Liquid Chemical Distribution Systems Revision:SEMI C90-1015 - Superseded This Standard applies to two

This Standard applies to two and four fastener configurations

previously published November 2002

35-1109 (technical revision)

Colloidal silica has a relatively narrow size distribution and has lower interaction with filter material

This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18

C09000 - SEMI C90 - Specification for Perfluoroalkoxy Alkane (PFA) and Other Fluorinated Materials Used In Liquid Chemical Distribution Systems Revision:SEMI C90-1015 - Superseded This Standard applies to two1 Purpose 1. 1 This standard specifies extraction limits for metals from liquid chemical distribution system components (e. g., tubing, fittings, and valves). 1. 2 This standard specifies procedures to measure extractable metal impurities from perfluoroalkoxy alkane (PFA) and other fluorinated materials and from high purity liquid distribution components. 2 Scope 2. 1 This Standard applies to the determination of metal extractable impurity