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D04300 - SEMI D43 - Test Method for Mechanical Vibration in AMHS for FPD Manufacturing StdPbc-0124 with the effects of manufacturing

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Description

with the effects of manufacturing process and design

本書面の範囲は半導体産業で使用する全グレードのDMSOである。

visual) evaluation of corrosion resistance

4-0422 (technical revision)

SEMI C92-0216 (replaced by SEMI F119)

D04300 - SEMI D43 - Test Method for Mechanical Vibration in AMHS for FPD Manufacturing StdPbc-0124 with the effects of manufacturingThis standard was technically approved by the global Flat Panel Display Factory Automation Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on September 8, 2005. It was available at www. semi. org in October 2005. In FPD manufacturing, customers have requirements concerning vibration of handling cassettes caused by the handling equipment during transportation. However, measurement methods and measurement

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