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SEMI MF534 — Test Method for Bow of Silicon Wafers
この文書の目的は，半導体製造装置の中で静電気電荷および電界に起因した生産性への悪影響を最小にすることである。本文書は，半導体製造に使われる装置が静電気的な両立性を確立するためのガイドである。半導体工場全体の静電気的な両立性は，SEMI E129に述べている。
equipment concept etc
org in March 2018
1 This Standard is applicable to measurement for optical properties of electronic paper displays under diffuse or directional illumination
F05100 - SEMI F51 - Guide for Elastometric Sealing Technology StdVol-3D-IC SEMI MF534 — Test MethodThis Standard was technically approved by the Facilities Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 28, 2017. Available at www. semiviews. org and www. semi. org in September 2017; originally published February 2000; previously published November 2015. O rings were originally developed for industrial markets and much later for aerospace. Current industry standards do not
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