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SEMI E5-92 (technical revision)
E This standard was editorially modified in February 2007 to correct an error
メッセージのやり取りによっては，応答メッセージを補い，サーバ側の動作完了を知らせる返信メッセージが追送される必要がある。
This Specification does not require that the metadata provided by the equipment be directly human readable
SEMI E125-1224 (technical revision)
E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdPbc-0814 SEMI E5-92 (technical revision)The purpose of this Guide is to establish a uniform, worldwide means for describing and measuring leak rates of mass flow controllers (MFCs). The leak integrity of a gas delivery system is important to maintaining product quality and performance. This Guide is intended to prevent confusion and misunderstanding between manufacturers and users. In particular, it distinguishes between mechanical and diffusion leak rates. This Guide contains definitions
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