E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange StdPbc-1121 NOTICE: This Document was completely

NOTICE: This Document was completely rewritten in 2016

SEMI A1-0521 (technical revision)

SEMI D9-0303 (Reapproved 0515)

Four aspects in evaluating filter performance are considered in this Guide:

18-0306 (first published)

E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange StdPbc-1121 NOTICE: This Document was completelyNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification is intended to promote consistent interface features between person guided vehicles (PGV) and equipment with a load port. This Specification defines a mechanical standard for the stationary (equipment)