C00339 - SEMI C3.39 - Specification for Nitrogen Trifluoride (NF3), 99.98% StdPbc-0418 semiconductor processes as reflected in

semiconductor processes as reflected in a number of existing standards

org in March 2012

This edition was approved for publication by the global Audits and Reviews Subcommittee on April 15

This Guide supports the approach by off-line measurement of the contaminants using best available techniques available in the laboratory setting

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C00339 - SEMI C3.39 - Specification for Nitrogen Trifluoride (NF3), 99.98% StdPbc-0418 semiconductor processes as reflected inThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in January 2018; originally published in 1984; previously published October 2011. The purpose of this Document is to provide a specification for boron trifluoride (BF3) used in the semiconductor industry. This Document