E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization Revision:SEMI E10-0600 - Superseded A standardization of the communication

A standardization of the communication concept between FMCS and FPUs will support FPU manufacturers

SEMI E69-0298 (Reapproved 0309)

previously published March 2010

The system concept involves mating a door on a cassette container to a door on an equipment canopy and transferring the cassette into

2 This Standard establishes limits on impurities extractable from components

E01000 - SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization Revision:SEMI E10-0600 - Superseded A standardization of the communication1 Purpose 1. 1 This Specification establishes a common basis for communication between users and suppliers of manufacturing equipment in the semiconductor and related industries by providing a standardized methodology for measuring reliability, availability, and maintainability (RAM) and utilization performance of equipment in a manufacturing environment. 2 Scope 2. 1 This Specification defines six mutually exclusive, basic equipment states for all of