D04800 - SEMI D48 - Specification for Reference Position of Substrate ID to Specify Datum Line for ID Reader for Handing Off/On Tool Revision:SEMI D48-1107 - Inactive While the static leach-out testing

While the static leach-out testing is recommended to verify the quality of the resin normally used in the facility

As a reference for the creation of technology-specific object model definitions

Each process module will typically have a different set of context and process data parameter values

This Standard is expected to:

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D04800 - SEMI D48 - Specification for Reference Position of Substrate ID to Specify Datum Line for ID Reader for Handing Off/On Tool Revision:SEMI D48-1107 - Inactive While the static leach-out testingThis standard was technically approved by the global Flat Panel Display Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on September 5, 2007. It was available at www. semi. org in October 2007. This standard defines the datum line of an ID two dimensional code (hereafter, 2D ID) reader, by clarifying the positional relationship among equipment, AMHS (including equipment, loader unloader and robot),