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Trifluoromethane (CHF3) is a colorless
Flat Panel Display）（FPD）用ガラス基板を，FPD製造工程で使用されている試薬を用いて定量的に評価する。
They effect the means for producing
Updates and historical versions are also included
SEMI C93-0216 (Preliminary) (first published)
C04200 - SEMI C42 - Specification for Sodium Hydroxide Pellets SEMIViews Trifluoromethane (CHF3) is a colorlessThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 27, 2010. Available at www. semi. org in October 2010; originally published in 1978; previously published November 2005. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive