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SEMI 3D2-0216 (Reapproved 0222)
more than seven facility connections and more than three utility types
CFJ includes the following functionalities
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older LSI generations are included as well
M06800 - SEMI M68 - Test Method for Determining Wafer Near-Edge Geometry from a Measured Height Data Array Using a Curvature Metric, ZDD StdPbc-0310 SEMI 3D2-0216 (Reapproved 0222)Wafer near edge geometry can significantly affect the yield of semiconductor device processing. Knowledge of near edge geometrical properties can help the producer and consumer determine if the dimensional characteristics of a specimen wafer satisfy given geometrical requirements. The metric, ZDD, quantifies the near edge curvature of wafers used in semiconductor device processing. Consideration should be given to the use of this or other proposed