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D05000 - SEMI D50 - Test Method for Surface Hardness of FPD Polarizing Film StdTpc-FPD Substrates SEMI E172 — Specification for

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Description

SEMI E172 — Specification for Secs Equipment Data Dictionary (SEDD)

SEMI E84-0823 (technical revision)

微粒子の静電気吸着を低減することによる汚染管理では,領域の静電気のリスクは静電気の電荷の存在とレベルによって定義される。

This Standard will also insure interchangeability at all mechanical interfaces within process tools as well as with transportation and automation cassettes

This Classification includes the following:

D05000 - SEMI D50 - Test Method for Surface Hardness of FPD Polarizing Film StdTpc-FPD Substrates SEMI E172 — Specification forThis Test Method defines the procedural guideline for measuring the surface hardness of a film and other components for Flat Panel Display (FPD) excluding glass. These procedures are applicable to manufacturing, quality control, and development work. This Test Method clarifies the differences when evaluating films and other components and its materials, using ISO 15184, the specification defined for determining the hardness of coating film. It

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