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To comply with this Specification
7 — Guide for the Design and Manufacture of Polymer Assemblies Used for Liquid Chemical Systems in Semiconductor Equipment
1-1107 (technical revision)
SEMI E167 — Specification for Equipment Energy Saving Mode Communication (EESM)
and adds Prober Job state model to GEM Standard requirements and capabilities
E16500 - SEMI E165 - Guide for a Comprehensive Equipment Training System When Dedicated Training Equipment is not Available Revision:SEMI E165-0712 - Superseded To comply with this SpecificationNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: Paragraphs entitled NOTE: are not an official part of this Standard or Safety Guideline and are not intended to modify or supersede the official Standard or Safety Guideline. These have been supplied by the global
US$ 25.00
US$ 13.00
US$ 13.00