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NOTICE: This document was balloted and approved for withdrawal in 2010
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2 — Guide for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment
1-0200 (first published)
SEMI E33-94 (first published)
E17000 - SEMI E170 - Specification for Secured Foundation Of Recipe Management System (SFORMS) Revision:SEMI E170-0215 - Superseded NOTICE: This document was ballotedThe purpose of this Standard is to provide a standardized secure, safe and efficient recipe operation mechanism between Recipe Management System (RMS) and equipment which is used as a foundation of RMS for semiconductor manufacturing systems or similar ones. The purpose of this Standard is to provide a standardized secure, safe and efficient recipe operation mechanism between RMS and equipment which especially supports RMS with the following concepts: