A00500 - SEMI A5 - Specification for Factory Operation Extension for SEMI A2 SMASH (SMASH-FOX) Revision:SEMI A5-0521 - Superseded SEMI MF1727-0304 (technical revision)

SEMI MF1727-0304 (technical revision)

This edition was approved for publication by the global Audits and Reviews Subcommittee on March 11

It is expected that a process module can be connected to the transport module of any cluster tool with least design change provided that both modules meet the requirement of this Standard

FPD製造に使用するプロセスツールのツールポートに関わる主要な要求事項を規定する。これらの主要要求事項は，それらを標準化することによって，搬送装置とツール間のインタフェースをうまく機能することにある。この標準化は，マテリアルハンドリング装置の選択に自由度を持たせて，コスト低減に配慮したインタフェースを奨励することを目的とする。

It provides guidance for specifying components and addresses options for using an underlying distributed object communication infrastructure

A00500 - SEMI A5 - Specification for Factory Operation Extension for SEMI A2 SMASH (SMASH-FOX) Revision:SEMI A5-0521 - Superseded SEMI MF1727-0304 (technical revision)* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1