C00358 - SEMI C3.58 - Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality StdPbc-0515 1 The purpose of this

1  The purpose of this Document is to provide specifications for tungsten hexafluoride (WF6) that are used in the semiconductor industry

buffer oxide etchants

SEMI C31-0699 (first published - replaces SEMI C1

TSVs are expected to be a critical element in future three-dimensional stacked integrated circuit (3DS-IC) packaging

org in October 2010

C00358 - SEMI C3.58 - Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality StdPbc-0515 1 The purpose of thisThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 0217. Available at www. semiviews. org and www. semi. org in April 2018; originally published June 2000; previously published October 2011. The purpose of this Document is to provide specification for octafluorocyclobutane (C4F8), that is used in the semiconductor