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1 This Specification does not define any new behavior required of the equipment other than that necessary for retrieving information describing equipment configuration
1-0414 — Specification for SOAP Binding for Equipment Self Description (EqSD)
Automated self-indexing with such communications as GPIB or RS-232C between tester and prober equipment is outside the scope of this Specification but is not precluded
respectively
Semiconductor process technology continues to move toward smaller product geometries
E11400 - SEMI E114 - Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery Systems StdTpc-Equipment Process Control 1 This Specification does notThe purpose of this Standard is to define a test method used to determine the electrical length, power losses, and characteristic impedance variation of RF cable assemblies used in RF power delivery systems for semiconductor processing equipment. This Standard specifies the testing procedures and test equipment required for the following: Determining the electrical length of RF cable assemblies at the nominal operating frequency in terms of degrees of
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