E02800 - SEMI E28 - Guide for Pressure Specifications of the Mass Flow Controller Revision:SEMI E28-92 (Reapproved 0299) - Superseded SEMI D63-0818 (technical revision)

SEMI D63-0818 (technical revision)

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SEMI F57 — Specification for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems

E02800 - SEMI E28 - Guide for Pressure Specifications of the Mass Flow Controller Revision:SEMI E28-92 (Reapproved 0299) - Superseded SEMI D63-0818 (technical revision)1 Purpose 1. 1 The purpose of this Guide is to establish a uniform, worldwide means to describe pressure parameters as they relate to mass flow controllers (MFC). It is intended to prevent confusion and misunderstanding between manufacturers and users. 2 Scope 2. 1 This Guide contains definitions of terms which describe gas pressure in MFCs as used in the semiconductor industry. SI units are the reference units for this Guide. Referenced SEMI