F06400 - SEMI F64 - Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers Revision:SEMI F64-0701 (Reapproved 1111) - Superseded Typical examples include dips

Typical examples include dips

The experimental data were provided by volunteer participants in this study and have not been independently verified

SEMI E63-0616 (technical revision)

SEMI E22-0697 (Reapproved 0309)

SEMI 3D2-0216 (technical revision)

F06400 - SEMI F64 - Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers Revision:SEMI F64-0701 (Reapproved 1111) - Superseded Typical examples include dipsThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 2017. Available at www. semiviews. org and www. semi. org in March 2018; originally published July 2001; previously published November 2011. The purpose of this Document is to define a method for characterizing a mass flow controller (MFC) being considered for installation